Flexural Cavity Mechanics in Electrostatically Driven 1D Phononic Crystal

Abstract

Phononic Crystals provide a versatile platform for controlling phonons in applications such as waveguiding, filtering, and sensing. To minimize dissipation, cavity resonators are often embedded within the bandgap of phononic crystals and integrated with suitable transduction techniques. Here, we demonstrate one-dimensional (1D) phononic transmission using electrostatic transduction, enabling the realization of high-quality mechanical oscillators. Using a double-ended tuning fork resonator embedded in a 1D phononic crystal, we observe degenerate flexural modes (in-phase and out-phase) exhibiting enhanced and comparable quality factors within the same device due to mode degeneracy. The in-phase mode, whose frequency lies inside the phononic bandgap, shows an approximately two-fold increase in quality factor compared to an anchored resonator, while this enhancement diminishes for the out-phase mode (frequency outside the bandgap) at temperatures where thermoelastic dissipation is negligible. This approach offers a promising route toward low-loss, encapsulated phononic devices for sensing and signal processing applications.